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Carrier loading area: 1,400 mm x 1,600 / 2,000 mm Typical tact time: 40 - 75 s per carrier Parallel processing of substrates (e.g. display, glass, Si wafers) via carrier tray High-speed automatization for carrier tray loading and unloading (single or double side) Top down and bottom-up sputtering configurable
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Carrier loading area: 1,400 mm x 1,600 / 2,000 mm . Typical tact time: 40 - 75 s per carrier . Parallel processing of substrates (e.g. display, glass, Si wafers) via carrier tray . High-speed automatization for carrier tray loading and unloading (single or double side)
A self-centering wafer carrier system for a chemical vapor deposition (CVD) reactor includes a wafer carrier comprising an edge. The wafer carrier at least partially supports a wafer for CVD processing. A rotating tube comprises an edge that supports the wafer carrier during processing. An edge geometry of the wafer carrier and an edge geometry of the rotating tube being chosen to provide a ...
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